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METHOD AND ON-CHIP CONTROL APPARATUS FOR ENHANCING PROCESS RELIABILITY AND PROCESS VARIABILITY THROUGH 3D INTEGRATION

机译:通过3D集成增强过程可靠性和过程可变性的方法和片上控制设备

摘要

A method and on-chip controller for enhancing semiconductor chip process variability and lifetime reliability through a three-dimensional (3D) integration applied to electronic packaging. Also provided is an on-chip reliability/variability controller arrangement for implementing the inventive method.
机译:一种通过应用于电子封装的三维(3D)集成来增强半导体芯片工艺可变性和寿命可靠性的方法和片上控制器。还提供了用于实施本发明方法的片上可靠性/可变性控制器布置。

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