Using reverse arrangement for trend test in statistical process control for manufacture of semiconductor integrated circuits

摘要

A method for manufacturing semiconductor devices or other types of devices and/or entities. The method includes providing a process (e.g., etching, deposition, implantation) associated with a manufacture of a semiconductor device/ The method includes collecting a plurality information (e.g., data) having a non-monotonic trend of at least one parameter associated with the process over a determined period. The method includes processing the plurality of information having the non-monotonic trend. The method includes detecting an increasing or a decreasing trend from the processed plurality of information having the non-monotonic trend. The method includes performing an action based upon at least the detected increasing or decreasing trend.