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Methods of forming metal silicide layers by annealing metal layers using inert heat transferring gases established in a convection apparatus
Methods of forming metal silicide layers by annealing metal layers using inert heat transferring gases established in a convection apparatus
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机译:通过使用对流设备中建立的惰性传热气体对金属层进行退火来形成金属硅化物层的方法
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摘要
Methods of forming metal silicide layers include a convection-based annealing step to convert a metal layer into a metal silicide layer. These methods may include forming a silicon layer on a substrate and forming a metal layer (e.g., nickel layer) in direct contact with the silicon layer. A step is then performed to convert at least a portion of the metal layer into a metal silicide layer. This conversion step is includes exposing the metal layer to an inert heat transferring gas (e.g., argon, nitrogen) in a convection or conduction apparatus.
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