Negative luminescence cold shield (NLCS) with microlenses to magnify the effective area of sparsely populated negative luminescence regions and method of fabrication

摘要

An array of microlenses magnifies the effective negative luminescence regions of a sparsely populated NLCS so that the NLCS appears cold to a FPA. This approach reduces the total diode area with minimal effect on device processing. The microlenses are fabricated on the backside of the substrate away from the devices, either prior to or after device processing. This ensures high quality devices that maintain NL efficiency without negatively impacting power consumption.