MEMS BASED VIBRATION AND PRESSURE SENSOR

摘要

The present invention is on MIcro electromechanical system (MEMS). A thin membrane of polymer is uniformly charged. When the membrane comes in contact with a vibrating body, it starts vibrating which results in simple harmonic motion of the charges present on the polymer. This leads to emission of electromagnetic radiation. The frequency and amplitude of the radiation gives an indication of the frequency and amplitude of the vibrating system. Fluid pressure, is a result of collision of the molecules with the walls of the container. Hence the above technique can also be used to measure fluid pressure.