Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing therefor.

• 1. 带镀层的二色成型用热塑性聚氨酯树脂组合物、镀敷用二色成型体、带镀层的二色成型体、以及它们的制造方法 [P] . 中国专利： CN101983216A . 2011-03-02
• 2. 投影装置,DLP投影仪的光模块和用于制造二向色镜的方法 [P] . 中国专利： CN104698729A . 2015-06-10
• 3. Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing therefor [P] . 美国专利： US8451429B2 . 2013-05-28

  机译： 二向色镜，二向色镜的制造方法，光刻设备，半导体器件及其制造方法

• 4. DICHROIC MIRROR, METHOD FOR MANUFACTURING A DICHROIC MIRROR, LITHOGRAPHIC APPARATUS, SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREFOR [P] . 美国专利： US2009284728A1 . 2009-11-19

  机译： 双斜面镜，双斜面镜的制造方法，光刻设备，半导体装置及其制造方法

• 5. DICHROIC MIRROR, METHOD OF MANUFACTURING THE SAME, AND LITHOGRAPHY DEVICE, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE DEVICES [P] . 日本专利： JP2009272622A . 2009-11-19

  机译： 二面镜，其制造方法，光刻装置，半导体装置以及装置的制造方法

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• 3. FINITE DIFFERENCE FRACTIONAL STEP METHODS FOR THE TRANSIENT BEHAVIOR OF A SEMICONDUCTOR DEVICE [J] . Yuan Yirang 数学物理学报（英文版） . 2005,第003期
• 4. IMPLICIT-EXPLICIT MULTISTEP FINITE ELEMENT-MIXED FINITE ELEMENT METHODS FOR THE TRANSIENT BEHAVIOR OF A SEMICONDUCTOR DEVICE [J] . 陈蔚 数学物理学报（英文版） . 2003,第003期
• 5. A MIRROR SPOT POSITION CALIBRATING METHOD, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD [J] . Research Disclosure . 2021,第681期
• 6. Patent Issued for Lithographic Apparatus and Device Manufacturing Method Manufacturing Method [J] . Journal of Engineering . 2013,第13期
• 7. A SENSOR POSITIONING METHOD, A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A METROLOGY APPARATUS, AND A DEVICE MANUFACTURING METHOD [J] . Research Disclosure . 2021,第689期
• 8. Design of Dichroic Mirrors for Space Applications by the MoM/BI-RME Method: from Planar to Curved Structures [C] . Bozzi, M., Formaggi, . 2006
• 9. Lithographically Patterned Nanoscale Electrodeposition of Plasmonic Split Nanoring Arrays for the Fabrication of Near Infrared Dichroic Polarizing Filters [D] . Cho, Kyunghee. 2014
• 10. Full density fluorescence molecular tomography (FD-FMT) based on a dichroic mirror [O] . HAO YANG, XIANJIN DAI, HUABEI JIANG -1
• 11. Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program [O] . Haico Victor Kok 2008

• 1. Manufacturing of Lightweight Mirror [J] . . 光学精密工程 . 2001,第005期
• 2. 红外/毫米波二向色镜的设计与制备 [C] . 章雪挺 ,顾培夫 . 中国仪器仪表学会第六次全国会员代表大会暨学术会议 . 2003
• 3. 高功率激光合束二向色镜研究 [A] . 王敏 . 2018