METHOD FOR DETERMINATION OF TEMPERATURE OF ELECTRONS IN PLASMA

摘要

Method for determination of temperature of electrons in plasma by means of electric probe is in fact that the probe is connected to one of the poles of source of direct voltage being controlled, with setting probe potentialwith respect to other pole connected to support electrode that is in contact with plasma. One places probe to area of plasma under investigation and with change of potential of probe with respect to support electrode one determines floating potential of probe, at which current through probeis decreased to zero with decrease of probe potential to that smaller than floating potential, one determines ion saturation currentas value of current through probe that does not vary a lot at following decrease of probe potential, with increase of potential of probe from floating potential to plasma potential, at which current through probe comes to saturation, one determines dependence of electronic current to probeas sum of ion saturation current and current through probe, i.e.., on potential of probe, and after that one calculates temperature of electrons in plasma as absolute value of the value inverse to ratio of increment of dependence of logarithm of value of electronic current to probe on potential of probe to increment of probe potential at values of probe potential smaller than potential of plasma, thus by formula, where- temperature of electrons in plasma,- probe potential,- electronic current to probe depending on potential of probe. One chooses value of probe potential smaller than floating potential of probe.