OPTICS TJNIT FOR LASER MICRO-MACHINING WITH FLUID SUPPORTED PUCK AND MEANS FOR OFF-SETTING THE LASER OPTICS WITH RESPECT TO THE AXIS OF THE PUCK

摘要

The present invention relates to a laser optics unit comprising: an optics head(12) with an imaging or focussing lens and lens control means adapted to providea laser beam (14) giving an image of a mask or a focus (13) of a beam along an axis ofthe beam (14) at a datum point in the unit; a work station (W) adapted to positiona substrate work piece (15) relative to the datum point so as to provide for thepositioning of the mask image or beam focus (13) along the axis of the beam (14)perpendicular to the substrate work piece (15) positioned by the work station(W); the work station (W) being further adapted to displace the work piece (15)in a given direction (X, Y) transverse the axis of the beam (14); a puck (11) andmeans for providing for the puck to be fluid supported over a puck region on a substratework piece (15) on the work station (W); and means linking the puck (11) to the opticshead to enable the puck (15) to displace the optics head (12) relative to the axisdirection (X, Y), and off-setting means (D) whereby the puck (11), and so the puckregion, at least when the puck (11) is fluid supported, is offset from the axisof the laser beam (14) in a direction perpendicular to the axis of beam ( 14 ).