method of producing a massstabes, and so are scale and a positionsmesseinrichtung

• 1. 相对位置信息校正装置、相对位置信息校正方法、相对位置信息校正程序、形状向量产生装置、形状向量产生方法和形状向量产生程序 [P] . 中国专利： CN1656357A . 2005-08-17
• 2. 基板检查装置、检查位置补正方法、位置补正信息产生方法、以及位置补正信息产生系统 [P] . 中国专利： CN111386469A . 2020-07-07
• 3. method of producing a massstabes [P] . 德国专利： DE000001188306A . 1965-03-04

  机译： 产生肿块的方法

• 4. such engineered scale and a positionsmesseinrichtung [P] . 德国专利： DE50213242D1 . 2009-03-12

  机译： 这样的工程规模和职位

• 5. positionsmesseinrichtung with scale [P] . AT401554T . 2008-08-15

  机译： 按比例定位信息

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