MICROMECHANICAL COMPONENT AND METHOD FOR EXCITING OSCILLATIONS IN AN OSCILLATING ELEMENT OF A MICROMECHANICAL COMPONENT

摘要

The invention relates to a micromechanical component and a method for exciting oscillations in an oscillating element of a micromechanical component, said component having an outer frame that is connected to the support substrate and can oscillate in relation to said substrate and an oscillating element that is connected to the outer frame and can be tilted about a first axis on a primary extension plane of the support substrate and/or tilted about a second axis that is perpendicular to the first axis on the primary extension plane. According to the invention, the micromechanical component has at least one electrode on a plane running parallel to the primary extension plane, said electrode or electrodes overlapping the outer frame in a perpendicular direction in relation to the primary extension plane. The method for exciting oscillations in the oscillating element of the micromechanical component comprises the excitation of the oscillating element by an electrostatic force between the outer frame and at least one electrode, the oscillating element being coupled to the outer frame.