MICROMECHANICAL COMPONENT AND METHOD FOR OSCILLATION EXCITATION OF AN OSCILLATION ELEMENT OF A MICROMECHANICAL COMPONENT

摘要

A micromechanical component and a method for oscillation excitation of an oscillation element of a micromechanical component are proposed, wherein the micromechanical component has a frame connected to a carrier substrate by an outer suspension element, wherein the frame can be tilted about a first axis and is capable of oscillating about a second axis, which is perpendicular to the first axis, and wherein the micromechanical component has an oscillation element, which is connected to the frame by an inner suspension element and can be tilted about the second axis, and wherein the outer suspension element is furthermore provided with dimensioning such that a first oscillation of the frame about the second axis and a second oscillation of the oscillation element about the second axis have a maximum coupling.