WAVELENGTH DISPERSIVE X-RAY SPECTROMETER WITH X-RAY COLLIMATOR OPTIC FOR INCREASED SENSITIVITY OVER A WIDE X-RAY ENERGY RANGE

摘要

An x-ray collimator for wavelength dispersive spectroscopy and the like includes a grazing incidence mirror optic having a polycapillary x-ray optic nested therein. The polycapillary x-ray optic is mounted in a hollow bore of the grazing incidence mirror optic so as not to interfere with operation of the grazing incidence mirror. The polycapillary x-ray optic extends the range of the grazing incidence mirror optic to higher energy ranges. The x-ray collimator of the present invention may be employed in a wavelength dispersive x-ray spectrometer including a diffracting element positioned to receive x-rays collimated by the x-ray collimator, and an x-ray detector positioned to receive the x-rays defracted by the diffracting element. A wavelength dispersive x-ray spectrometer in accordance with the present invention may be used in combination with an energy beam microscope, such as an electron microscope, to analyze x-rays emanating from a sample specimen.