Charged particle beam device for high spatial resolution and multiple perspective imaging

摘要

The present invention relates to a charged particle device with improved detection scheme. The device has a charged particle source (1) providing a beam of primary charged particles; a first unit (5) for providing a potential; a second unit (7) for providing a potential; and a center unit (6) positioned between the first unit (5) and the second unit (7). The center unit is capable of providing a potential different from the potential of the first and the second unit for decelerating the primary charged particles to a first low energy and for accelerating the primary charged particles to a second high energy. Therein, the first unit (5) and/or the second unit (7) is a detector for detecting secondary electrons released at a specimen (4).