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SCANNING NANOJET MICROSCOPE AND THE OPERATION METHOD THEREOF

机译:扫描纳米显微镜及其操作方法

摘要

The inventive scanning nanojet microscope comprises one or several nozzles for producing an agent scanning jet and a system for collecting a radiation obtained in the area where the jet contacts an object. The nozzle is embodied in the form of an optical resonator made from a light-transparent capillary into which walls a narrow band light radiation is introduced by means of a light guide. The capillary length is selected is such a way that it is multiple of the light radiation half-wavelength. The inventive method consists in producing a heterogeneous light pressure on the jet and in carrying out the object three-dimensional scanning, wherein the interruption of the light radiation interrupts the jet and the microscope resolving power is defined by the jet diameter. Said microscope can be used in a scanning jet lithography for controlling a production process in a real-time mode. The microscope makes it possible to non-destructively study dielectrical and biological objects devoid of a current-conducting coating and to monitor a living cell in a real-time
机译:本发明的扫描纳米射流显微镜包括一个或多个用于产生药剂扫描射流的喷嘴和一个用于收集在射流与物体接触的区域中获得的辐射的系统。喷嘴以光谐振器的形式构成,该光谐振器由透光的毛细管制成,通过光导将窄带光辐射引入壁中。选择毛细管长度的方式使得它是光辐射半波长的倍数。本发明的方法包括在喷嘴上产生异质的光压力并进行物体三维扫描,其中光辐射的中断使喷嘴中断,并且显微镜的分辨能力由喷嘴直径确定。所述显微镜可用于扫描喷射光刻中,以实时模式控制生产过程。显微镜可以无损研究不含导电涂层的介电和生物物体,并实时监控活细胞

著录项

  • 公开/公告号EP1953763A4

    专利类型

  • 公开/公告日2008-12-17

    原文格式PDF

  • 申请/专利权人 ILYANOK ALEXANDER MIKHAILOVICH;

    申请/专利号EP20060804610

  • 发明设计人 TIMOSHCHENKO IGOR ANDREEVICH;

    申请日2006-11-02

  • 分类号B82B3/00;G01Q60/00;G01Q80/00;G03F7/00;G03F7/20;

  • 国家 EP

  • 入库时间 2022-08-21 19:20:10

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