首页> 外国专利> A DETECTOR FOR DETECTING PARTICLE RADIATION OF AN ENERGY IN THE RANGE OF 150 EV TO 300 KEV, AND A MATERIALS MAPPING APPARATUS WITH SUCH A DETECTOR.

A DETECTOR FOR DETECTING PARTICLE RADIATION OF AN ENERGY IN THE RANGE OF 150 EV TO 300 KEV, AND A MATERIALS MAPPING APPARATUS WITH SUCH A DETECTOR.

机译:用于检测能量在150 EV至300 KEV范围内的粒子辐射的检测器,以及带有该检测器的材料映射设备。

摘要

Detector for detection of particle radiation, particularly particle radiation having an energy in the range of 150 eV to 300 keV, comprising at least one detector element, said detector element comprising a semiconductor detector material, at least a set of line-shaped electrodes conductively connected to at least one surface of said semiconductor detector material, each set comprising a plurality of line-shaped electrodes extending in parallel, and signal processor communicating with said line-shaped electrodes, wherein, in each set, said line-shaped electrodes are distributed with a strip pitch of less than 3 μm, and that the thickness of said semiconductor detector material is of less than three times the strip pitch of said line-shaped electrodes.
机译:用于检测粒子辐射,特别是能量在150 eV至300 keV范围内的粒子辐射的检测器,包括至少一个检测器元件,所述检测器元件包括半导体检测器材料,至少一组导电连接的线形电极在所述半导体检测器材料的至少一个表面上,每组包括多个平行延伸的线形电极,以及与所述线形电极连通的信号处理器,其中,在每组中,所述线形电极分布有带间距小于3μm,并且所述半导体检测器材料的厚度小于所述线状电极的带间距的三倍。

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