Detection of special minority gases with optical emission spectroscopy

摘要

The method involves retaining characteristic lines of major and easily excitable gaseous species e.g. nitrogen, in an original optical spectrum of radiation emitted by a plasma (4). Amplitude of the major species is sensitive to presence of minor and hardly excitable species e.g. humidity. Information over concentration of the minor species is deducted from the amplitude of the lines. An independent claim is also included for a device of detecting minor and hardly excitable gaseous species.