SUBMERGED PLASMA COATING APPARATUS, ELECTRODE FOR SUBMERGED PLASMA, AND COATING METHOD USING SUBMERGED PLASMA

摘要

Disclosed is a submerged plasma coating apparatus having: a container (1) that is capable of containing a substrate (S) and a liquid (L) that includes raw material, an electrode for submerged plasma (2) that is provided in the container (1), and a power supply apparatus (3) that supplies power to the electrode for submerged plasma (2). The electrode for submerged plasma (2) comprises: a main electrode (21) having a discharging end (22); a sub-electrode (26) that faces the discharging end (22) and is also provided between the discharging end (22) and the substrate (S), which face one another; and a plasma generator (29) that has a space partitioned off by a surface (22a) of the discharging end (22) and a surface (26a) of the sub-electrode (26) that faces the surface (22a), and generates plasma in the space by power supplied from the main electrode (21). The plasma generated by the plasma generator (29) is brought into contact with the substrate (S), and degradation components of the raw material are deposited on the surface of the substrate (S). The structure enables plasma to be generated in a liquid without using a second electrode as a substrate.