首页>
外国专利>
MICROMACHINED ACCELEROMETER AND METHOD WITH CONTINUOUS SELF-TESTING
MICROMACHINED ACCELEROMETER AND METHOD WITH CONTINUOUS SELF-TESTING
展开▼
机译:具有连续自检功能的微机加速度计和方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Micromachined accelerometer and method in which a proof mass is suspended above a substrate for movement in response to acceleration, electrodes form capacitors which change in capacitance in response to movement of the proof mass, processing circuitry responsive to the changes in capacitance provides an output signal corresponding to movement of the proof mass, a test signal is applied to the electrodes during use of the accelerometer to produce additional movement of the proof mass and a corresponding test signal component in the output signal, and the output signal is monitored to determine whether the accelerometer is operating normally by the presence of the test signal component in the output signal. The test signal may be varied, or may have several frequency components.
展开▼