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APPARATUS AND METHOD FOR DEEP ULTRAVIOLET OPTICAL MICROSCOPY
APPARATUS AND METHOD FOR DEEP ULTRAVIOLET OPTICAL MICROSCOPY
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机译:深紫外光学显微镜的装置和方法
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摘要
An apparatus and method for performing optical microscopy are disclosed. In at least one embodiment, the apparatus includes a deep ultraviolet light source configured to generate light having a wavelength within a window in the deep ultraviolet region of the electromagnetic spectrum within which a local minimum in the absorption coefficient of Oxygen occurs. Further, the apparatus includes a lens device that receives at least a first portion of the generated light, directs at least some of the first portion of the generated light toward a location, receives reflected light from the location, and directs at least some of the reflected light toward a further location. Additionally, the apparatus includes a camera device that is positioned at one of the further location and an additional location, where the camera device receives at least a second portion of the reflected light, whereby an image is generated by the camera device.
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