A method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having a nano-apertures and horizontal and/or vertical nanowires obtainable by this method

摘要

The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of:i) providing a mold comprising at least one sharp concave corner;ii) conformational depositing at least one structural material in the sharp concave corneriii) isotropically removing structural material;iv) depositing at least one other structural material;v) removing earlier deposited structural material;vi) forming a nanosubstructure; andvii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.