METHOD FOR MAKING A 3D NANOSTRUCTURE HAVING A NANOSUBSTRUCTURE, AND AN INSULATING PYRAMID HAVING A METALLIC TIP, A PYRAMID HAVING NANO-APERTURES AND HORIZONTAL AND/OR VERTICAL NANOWIRES OBTAINABLE BY THIS METHOD

摘要

The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.