首页>
外国专利>
SPIN-POLARIZATION ION BEAM GENERATOR, SCATTERING SPECTROSCOPE USING THE SPIN-POLARIZATION ION BEAM, AND SPECIMEN PROCESSING DEVICE
SPIN-POLARIZATION ION BEAM GENERATOR, SCATTERING SPECTROSCOPE USING THE SPIN-POLARIZATION ION BEAM, AND SPECIMEN PROCESSING DEVICE
展开▼
机译:自旋极化离子束发生器,使用自旋极化离子束的散射光谱和标本处理装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
A spin polarized ion beam generation apparatus (30) can efficiently generate a spin polarized ion by using a pumping light generator (33) to an ion in a high frequency discharge tube (15) to irradiate optical pumping (33,34) by circularly polarized light and linearly polarized light orthogonal to each other to a metastable atom. For example, a polarized helium ion beam having a spin polarization rate that exceeds 18% and that is as high as 25% can be generated. The spin polarized ion beam generation apparatus (30) also can be applied to a processing apparatus and an analysis apparatus that can irradiate a polarized ion beam to a specimen. According to the spin polarized ion scattering spectroscopy apparatus, the spin status in a region at a depth of about 2 to 3 atomic layers from the surface of the specimen can be measured while discriminating the elements from the atomic layer with a reduced measurement time and with a high accuracy impossible in the conventional technique.
展开▼