METHOD FOR FABRICATION MICRO-NANO METAL STRUCTURE

摘要

A method for preparing a micro-nano metal structure is provided to reproduce the complex or fine surface pattern structure on the semi-permanent metal structure precisely and cheaply. A method for preparing a micro-nano metal structure comprises the steps of preparing a master(102) where a nano-sized or micro-sized micropattern structure on surface and a PVC film(101) where the pattern of the master is transferred; pressurizing the PVC film with the master at the temperature above the glass transition temperature of the PVC film so as to transfer the pattern of the master to the PVC film; separating or removing the master from the PVC film at the temperature below the glass transition temperature of the PVC film; forming a metal seed layer for the electroplating of a thin film on the surface of the PVC film according to the pattern; carrying out the electroplating on the metal seed layer to form an electroplated material layer for charging the pattern of the PVC film; and separating or removing the PVC film from the electroplated material layer.