METHOD FOR PREPARING METAL THIN FILM MOLD HAVING SURFACE MICRO-NANO STRUCTURE, AND INTERMEDIATE OF METAL THIN FILM MOLD

摘要

Provided are a method for preparing a metal thin film mold having a surface micro-nano structure, and an intermediate of a metal thin film mold. The method comprises: providing a template having a surface micro-nano structure; forming a first anti-stick metal layer with a nano-scale thickness on the surface of the surface micro-nano structure of the template by means of first physical vapor deposition, wherein the first anti-stick metal layer and the template have a first binding force; and forming a first electroplated metal layer with a micron-scale thickness on the first anti-stick metal layer by means of first electroplating, wherein the first electroplated metal layer and the first anti-stick metal layer have a second binding force, the first binding force is smaller than the second binding force, and the first anti-stick metal layer also acts as a conducting layer in the first electroplating step. The method of the present invention can perfectly copy the three-dimensional surface micro-nano structure of the template, thereby obtaining a metal thin film mold having a desired surface micro-nano structure.