METHOD AND APPARATUS FOR PLASMA NITRIDING USED HIGH-DENSITY FORMED BY LOW-ENERGY ELECTRODE

摘要

A kind of method and apparatus for plasma nitriding used are highdensity to be made of the product specification for being arranged to improve a vehicle part the electrode of low energy, uses carbon steel. A kind of method, following process is executed using highdensity be made of the electrode of low energy for plasma nitriding, one sputter process, it increases electrode to a sample (P) after the vacuum degree for maintaining 1-10^-2torr and removes the impurity of residual gas and a sample surface when the mixed gas of injection H2 and Ar in a stove (100); According to the nitride layer, white layer formation process that nitride layer, white layer characteristic is to nitridation, inside the vacuum degree of stove inboard portion is controlled, nitrogen hydrogen is injected by determining ratio, multiple plate (210) spaces are laminated in constant interval, in outermost plate side include a covering (220) and increase power up to the multiple hollow cathode (200) equipped in stove inboard portion and the sample for creating highdensity plasma and nitride multiple hollow cathode; One cooling procedure injects nitrogen and cooling sample in stove inboard portion.