Ultra-pure chemicals automatic recharge system for chemicals or drugs are sensitive to pollution

摘要

The invention prevents the manifold and transfer line is relatively chemicals combustion hazard in the system between the manifold, the fail-safe device to ensure contamination-free operation is not necessary liquid amount detection system 54, and they are recharged and the oxygen to avoid infections, and seconds using the exhaust system 78 to ensure that the carrier gas composition of the system is adversely affected high purity pyrophoric high reliability for the organic metal chemical relates to a secure module automatically refill (bulk delivery) system.; Recharging system, chemicals storage, a manifold, a venturi, a capacitor sensor