GRAY TON MASK, METHOD FOR MANUFACTURING OF GRAY TON MASK, METHOD FOR MANUFACTURING OF PHASE MASK USING GRAY TON MASK, PHASE MASK OF MANUFACTURED FOR GRAY TON MASK AND MANUFACTURED PHASE MASK USING GRAY TON MASK

摘要

A gray-tone mask, a manufacturing method of the gray-tone mask, and a phase mask manufacturing method using the gray-tone mask and the phase mask manufactured by the gray-tone mask are provided to resolve or correct the problem of the optical system by using a transparent substrate having transmitting films and blocking films. A gray-tone mask(10) comprises a transparent substrate(12), transmitting films(14a, 14b) and a barrier layer(16). The transmitting film and the barrier layer are formed on one surface of the transparent substrate. The transmitting film can have the exposure pattern having the different light transmission. The barrier layer can have the light-shield pattern which does not overlap with the transmitting film. The phase mask comprises the transparency mask substrate and the phase level layer. The phase level layers are formed on one surface of the transparency mask substrate. The phase level layers can be formed by transferring the transmitting layer and the barrier layer to the photoresist.