METHOD FOR COATING DLC(DIAMOND LIKE CARBON) FILM WITH NITRIDING HARDENING ON THE VANE OF AIR COMPRESSOR BY LOW TEMPERATURE PECVD

摘要

A method of a low temperature nitration of a vein for an air compressor and a DLC coating is provided to maximize the lifetime of a product by improving the corrosion resistance and the lubrication of the product through a carbon system DLC layer coating of the low temperature. A method of a low temperature nitration of a vein for an air compressor and a DLC coating comprises: a step of forming a nitride layer on the surface of materials by injecting N2 and H2 by rate of 1:3 to a chamber inside(P10); a sputtering step of activating the surface of the materials by transmitting the pulse-like bias voltage to the materials for 10~30 minutes while injecting Ar in the chamber inside(P20); and a step of coating a DLC layer on the surface of the materials by injecting TMS, H3, Ar, H2 and hydrocarbon compound into the chamber inside after making the temperature of the chamber lower than 400°C and the pressure less than 2torr(P30).