HOLDING UNIT, POSITION DETECTING SYSTEM AND EXPOSURE SYSTEM, MOVING METHOD, POSITION DETECTING METHOD, EXPOSURE METHOD, ADJUSTING METHOD OF DETECTION SYSTEM, AND DEVICE PRODUCING METHOD

摘要

A specified clearance is formed between a detection system and a surface plate by force generating apparatuses (122a-122c, 124a-124c, 102) capable of generating a magnetic attraction force and a gas static pressure between a detection system (AL2) provided on the bottom surface side of an FIA surface plate (102) and the surface plate, and, with the clearance kept formed (floating state), the detection system is driven in at least one axis direction in a horizontal plane by driving apparatuses (102, 126). Since the detection system is kept in non-contact with the surface plate, a high-precision movement (positioning) of the detection system is enabled. If an attractive force is set larger than a repulsive force generated by the force generating apparatus, the detection system can be fixed (landed) in a positioned state with high precision. ® KIPO & WIPO 2009