PURPOSE: An excimer lamp and a lamp unit equipped with the same are provided to decrease the distance between the excimer lamp and the target object in a range of 0.1~5mm.;CONSTITUTION: A lamp unit including an excimer lamp has the up down two sides which extends to the longitudinal direction. A discharge vessel(51) seals the luminescent gas inside. One part of outer electrode is set up to the one side of the up down two sides. The excimer lamp(5) is made of two outer electrodes installed at the up down two sides. The excimer lamp is made of the lead retaining body which is set up to the discharge vessel. The lead retaining body(54) is comprised of the lead maintenance unit which has the electrically insulating and the plane support consisting of the thin sheet of metal. The plane supporting part(542) contacts with the flat plane of the discharge vessel.;COPYRIGHT KIPO 2010
展开▼
