EXCIMER LAMP RADIATION APPARATUS INCLUDING FEEDER UNIT FOR MAINTAINING TEMPERATURE OF EXCIMER LAMP CONSTANTLY AT TARGET TEMPERATURE

摘要

PURPOSE: An excimer lamp radiation apparatus is provided to maintain firing voltage of excimer lamp constant and achieve improved uniformity of radiation amount in time and location. CONSTITUTION: An excimer lamp radiation apparatus comprises an excimer lamp(1) for radiating ultraviolet light by the discharge with a dielectric material; a feeder unit(20) for supplying power to the excimer lamp; a temperature controller for heating and cooling temperature of the excimer lamp; and a control unit(40) for detecting temperature of the excimer lamp and maintaining the temperature at a predetermined target temperature value. The feeder unit maintains temperature of the excimer lamp constantly at the target temperature higher than normal temperature from prior to lamp turn-on.