TEMPERATURE CONDITIONING PLATE AND THERMAL TRANSFER PRESSING MACHINE

摘要

The passage of a pair of temperature-controlled plate 16 of the distribution by a vapor to heat the temperature-controlled plate (16). Flow path 163 is formed in plurality gatgoseo a predetermined distance along the length of the temperature control plate 16, the cross-section is formed in a substantially circular shape. In addition, the passage 163 is disposed substantially at the center in the thickness direction of the temperature conditioning plates (16). Accordingly, it is temperature controlled plate 16 can be satisfactorily prevent warping at the time of heating, cool the temperature controlled plate 16 are formed symmetrical with respect to the thickness direction. Thereby it is possible to satisfactorily transfer a concave-convex pattern of the stamper (17) to the substrate (5).