Microwave Plasma Reactor and Microwave Plasma Generator Comprising the Same

摘要

A method and an apparatus for generating atmospheric wide-area microwave plasma using a gridded cavity are provided to pre-process a large amount of targets with the plasma. A rectangular parallelepiped-shaped microwave plasma reactor includes a rectangular parallelepiped-shaped gird cavity with a rectangular reaction gas injecting gird metal plate(13), a rectangular plasma discharge gird metal plate(14), a microwave input unit(11), and a reaction gas injection unit(12). The two metal plates face each other to maintain a strong electric field, uniformly supply a reaction gas, and generate uniform plasma. The microwave input unit is installed at a side surface of the plasma reactor.