COMPENSATION METHOD OF NONLINEAR ERROR OF INTERFEROMETER BY THE ANGULAR ALIGNMENT OF A WAVE PLATE

摘要

The present invention relates to a nonlinear error compensation method of an interferometer by angular alignment of the waveplate to compensate for nonlinear errors by rearranging the waveplate so that the nonlinear error of the interferometer is minimized. Means for achieving this, including a first polarized light splitter and interfering the light incident through the double-pass interference, the second and third polarized light splitter and a half-wave plate and a quarter wave plate combined CLAIMS 1. A nonlinear error compensation method of an interferometer for obtaining an interference signal through a signal detector, comprising: a first step of measuring optical characteristics of first, second, and third polarized light splitters in a matrix form; Obtaining a rotation matrix of the half wave plate and the quarter wave plate; A third step of obtaining a nonlinear error using a matrix of the first, second, and third polarized light splitters, and a rotation matrix of the half wave plate and the quarter wave plate; A fourth step of calculating a minimum angular alignment value of the half-wave plate and the quarter-wave plate from the nonlinear error for each rotation angle of the half-wave plate and the quarter-wave plate; And a fifth step of compensating and rotating the half-wave plate and the quarter-wave plate by the minimum angle alignment value by the minimum angle alignment value. According to the present invention, it is possible to construct an interferometer having high resolution and accuracy through nonlinear error compensation.;Homodyne interferometer, optical interferometer, nonlinear error compensation, wave plate alignment