Enhancement of the recovery efficiency in the waste photoresist stripper recycling process

摘要

A method for enhancing recovery efficiency in the waste photoresist stripper recycling process is provided to collect the stripper solvent of high quality from the waste photoresist stripper and to improve recovery efficiency of the stripper solvent by minimizing the loss of thermal energy used in a recycling process and the recycled photoresist stripper. A method for enhancing recovery efficiency in the waste photoresist stripper recycling process comprises a step for controlling the concentration of the photoresist resin to become no greater than the maximum saturation concentration crystallizing the molten photo resist resin. The device for recycling the photoresist stripper comprises a waste photoresist stripper feeder, a distillation tower(15) connected to the feeder, a reboiler(6) connected to the floor(5) of the distillation tower, and a condenser(3) connected on the top of the distillation tower.