METHOD FOR MANUFACTURING HYDROGEN SENSOR USING Pd-Ni ALLOY THIN FILM AND HYDROGEN SENSOR MANUFACTURED BY THE METHOD

摘要

According to the present invention, a method is disclosed using the hydrogen sensor of the Pd-Ni alloy film. The method comprises: (a) after coating the resin layer on the substrate, a sense of delay, forming a pattern; (B) the sense patterns are formed on the substrate member, Pd and Ni and depositing a respective controlled by adjusting the deposition rate of the relative proportion of Pd and Ni, and Pd-Ni alloy; (C) removing the resin layer, the Pd-Ni alloy with a sense of delay, the sense of delay pattern to form on the substrate; (D) the Pd-Ni alloy body is detected again by applying a resin layer formed on the substrate, forming the electrode patterns in both ends and the middle of the predetermined position of the Pd-Ni alloy sense member; (E) depositing a conductive metal on the resin layer; (F) removing the resin layer, and a sense of the Pd-Ni alloy member comprising the steps of: forming an electrode electrically connected to the electrode patterns.