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MANUFACTORY METHOD OF NANO-MASTER WITH HYBRID NANO-PATTERN
MANUFACTORY METHOD OF NANO-MASTER WITH HYBRID NANO-PATTERN
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机译:混合纳米粉体的纳米母粒的制备方法
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摘要
A nano master manufacturing method having hybrid nano pattern is provided to maximize production effect by depositing aluminium on the silicon wafer, forming an aluminum layer and forming a nano pattern having a stable form. A nano master manufacturing method having hybrid nano pattern comprises; forming an aluminum layer into upper part of silicon wafer by sputtering; electrolytic polishing the upper side of the aluminum layer; etching oxidized aluminum oxide layer of the upper part of the aluminum layer; anode-oxidating electropolished aluminum layer of the upper part of silicon wafer; removing the aluminum oxide layer of the anode oxidation by etching and forming a nano pattern at an upper part of the aluminum layer; manufacturing a Ni stamper forming the nano pattern; and removing the aluminum layer and a silicon wafer from the Ni stamper and manufacturing a mold of the Ni stamper in which the nano pattern is formed.
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