MEASUREMENT METHOD FOR ELECTROMECHANICAL COUPLING CONSTANT OF PIEZOELECTRIC MATERIAL

摘要

FIELD: physics.;SUBSTANCE: invention can be applied for physical research and piezoelectric engineering in operating practice development of piezoelectric filming process, design and manufacture of high-frequency and superhigh frequency resonators and filters. Technical solution consists in antiresonant and resonant frequency measurement of formed compound cavity structures and additional measurement of difference between extreme frequencies at frequency dependences of electromagnetic wave reflectivity phase on the resonator. Thereafter K and K_eff are calculated by formulas adequately describing electro-acoustic properties of structure.;EFFECT: ensured possibility to measure electromechanical coupling constant of layers and films of piezoelectric material being in acoustic contact to substrate plate, to measure effective electromechanical coupling constant of overtone resonators.;3 dwg