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SOURCE OF IONS WITH MULTIPOLE MAGNETIC FIELD IN HOLLOW CATHODE
SOURCE OF IONS WITH MULTIPOLE MAGNETIC FIELD IN HOLLOW CATHODE
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机译:空心阴极中具有多极磁场的离子源
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摘要
FIELD: physics.;SUBSTANCE: in source of ions with multipole magnetic field in hollow cathode consisting of anode with emission aperture, hollow non-incandescent cathode executed in the form of the hollow cylinder from antimagnetic material which vacuity has length major, than diameter, on an outer side of the lateral surface of this cylinder, on all its length, the magnets formativing a multipole magnetic field in its vacuity which quantity reaches maximum near to the lateral wall of the cylinder are mounted and comes nearer to zero on its central long axis.;EFFECT: reduction of working pressure of gas in radiant of ions and magnification of phase ion beam density at source output.;2 dwg
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