Vacuum system, a method for the transport of an object in the vacuum by means of the vacuum system and use of the vacuum system

摘要

Vacuum system with:(a) a first chamber (1);(b) at least a second chamber (3) for a high vacuum;(c) a third chamber (2) for connecting the first chamber (1) and the second chamber (3); wherein(d) the third chamber (2) is so formed that it is the high vacuum of the second chamber (3) against the third chamber (2) which seals off, if the first chamber (1) via the third chamber (2) is evacuated by preliminary vacuum to a high vacuum.