A process for the automated production of functional objects having a three dimensional nanostructure as well as apparatus and image analyzing means for performing the method.

摘要

The proposal is for a method and a device for the automated production of functional objects having a three-dimensional nanostructure, in particular sensors for scanning probe microscopy, the device comprising: a) a fixing device (2) for fixing a substrate (1), b) a displacement table (3) with an actuator (11) for positioning the substrate (1) for a processing and / or test sequence c) a microscope (4) for producing images of the substrate (1) or of parts of the substrate (1), d) an image analysis means (5), which is used to analyze the images with regard to the occurrence of defined features and to obtain and / or transmit positioning commands to the actuator (11) of the displacement table (3 ) is formed in a positioning sequence and e) a source (6) for an energy and / or matter beam (7) for processing the substrate (1).