Evaluation of the surface structure of structural elements, with the use of different presentation angles

摘要

This application describes a process for optical measurement of the surface structure (111) of a component (110). The method has the following steps: (a) emission of an illumination light (102) in the direction of the component (110), (b) scanning of the component (110) by means of a relative movement (122) between the component (110) and the illumination light (102), wherein the device (110) at a first angle is illuminated and wherein a measurement light (107) is received by the component (110) at least partially to a light detector (106) is scattered backwardly, and (c) renewed scanning of the component (110) by a new relative movement (122) between the component (110) and the illumination light (102), wherein the device (110) is below a second angle is illuminated, which is different from the first angle, and wherein once again, a measurement light (107) is received by the component (110) at least partially onto the light detector (106) is scattered backwardly.