A method for the production of dlc - layers and doped polymers or diamond-like carbon coatings

摘要

The present invention relates to a process for the production of a dlc - layer on a substrate. According to the invention, on a substrate, a polymeric carbon - and hydrogen - containing between the product layer is applied, and subsequently, the between the product layer on the substrate in a plasma chamber for converting the between the product layer in a dlc - layer is treated with ions. In addition, substrates with a doped dlc - layer or with a doped between the product layer proposed.