Filter unit manufacturing method for filtration of e.g. gas, involves connecting micro screen wafer to micro screen-wafer-substrate unit, where substrate comprises openings within area of perforations of micro screen wafer

摘要

The method involves providing a micro-screen wafer with perforations (2) for passing through materials, and a substrate that is made of a glass plate or a glass ceramic plate, which undergoes anodic bonding and connected with the micro screen wafer by an anodic binding unit. The micro screen wafer is connected to a micro screen-wafer-substrate unit, where the substrate comprises openings within the area of the perforations of the wafer. The wafer and the substrate are connected with a discharge piece that is made of glass, high-grade steel, glass ceramic, ceramics or plastics. An independent claim is also included for a filter device including a filter unit.