european vapours (pecvd) from an internal barriereschicht on a container

摘要

Machine (1) for the pecvd of a thin layer of a material with a barrier effect, in a receptacle (2), this machine (1) including: - a treatment unit (4) receiving the container (2) and equipped with a generator (11) of electromagnetic waves; - an inlet (17) of the precursor gas; - an injector (13) for the introduction into the receptacle (2) of the precursor gas, this injector (13) having a lower end (14) which opens into the receptacle (2) and an upper end (15) opposite; - a pipe (20) of the supply of the precursor gas, which connects the inlet fluid (17) of the precursor gas to the upper end (15) of the injector (13); - a solenoid valve (25) is interposed in the conduit (20), between the inlet (17) of the precursor gas and the injector (13), immediately upstream of the upper end (15) of the injector (13).