Ultrasonic transducer has a capacitive micro - factory manufactured with silicon membrane epitaxial

摘要

It is proposed a cell of the ultrasonic transducer micro - machined capacitive (cmuts (10)). The cell cmuts (10) comprises a lower electrode (18). In addition, the cell cmuts (10) comprises a diaphragm (22) placed adjacent to the lower electrode (18) so as to form a space having a first width of the spacing between the diaphragm (22) and the lower electrode (18), the diaphragm (22) comprising a first epitaxial layer is a first layer of polysilicon. In addition, a reducing material is placed in the first epitaxial layer.