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BISPECTRAL DETECTION DEVICE AND BISPECTRAL SENSOR COMPRISING SUCH A DEVICE.
BISPECTRAL DETECTION DEVICE AND BISPECTRAL SENSOR COMPRISING SUCH A DEVICE.
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机译:双检测装置和包括该装置的双传感器。
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摘要
The present invention relates to a bispectral detection device (20; 80), especially an infrared radiation and a visible radiation, comprising: ▪ a monolithic substrate (21); ▪ a matrix of sensitive bolometric microbonts (23, 24). the infrared radiation, the bolometric microbonts (23, 24) being suspended above a first face (45) of the substrate via support arms and connection (31, 32); and▪ a matrix of photoelectric elements (39, 40) formed in the substrate (21) and sensitive to visible radiation, the bolometric microbonts (23, 24) and the photoelectric elements (39, 40) being superimposed, according to the invention the substrate portion (43) between the matrix of photoelectric elements (39, 40) and a second face (44) of the substrate, opposite to the first face (45) thereof, is thinned so that the photoelectric elements (39, 40) are able to detect incident visible radiation on the second face (44).
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