首页> 外国专利> BISPECTRAL DETECTION DEVICE AND BISPECTRAL SENSOR COMPRISING SUCH A DEVICE.

BISPECTRAL DETECTION DEVICE AND BISPECTRAL SENSOR COMPRISING SUCH A DEVICE.

机译:双检测装置和包括该装置的双传感器。

摘要

The present invention relates to a bispectral detection device (20; 80), especially an infrared radiation and a visible radiation, comprising: ▪ a monolithic substrate (21); ▪ a matrix of sensitive bolometric microbonts (23, 24). the infrared radiation, the bolometric microbonts (23, 24) being suspended above a first face (45) of the substrate via support arms and connection (31, 32); and▪ a matrix of photoelectric elements (39, 40) formed in the substrate (21) and sensitive to visible radiation, the bolometric microbonts (23, 24) and the photoelectric elements (39, 40) being superimposed, according to the invention the substrate portion (43) between the matrix of photoelectric elements (39, 40) and a second face (44) of the substrate, opposite to the first face (45) thereof, is thinned so that the photoelectric elements (39, 40) are able to detect incident visible radiation on the second face (44).
机译:本发明涉及一种双光谱检测装置(20; 80),尤其是红外辐射和可见辐射,其包括:▪整体式基板(21); ▪灵敏的辐射热微键矩阵(23、24)。红外辐射,辐射热微键(23、24)通过支撑臂和连接件(31、32)悬挂在衬底的第一面(45)上方; ·根据本发明,在衬底(21)中形成并且对可见辐射敏感的光电元件(39、40)的矩阵,辐射热微键(23、24)和光电元件(39、40)被叠加。使光电元件(39、40)的矩阵和与基板的第一面(45)相对的基板的第二面(44)之间的基板部分(43)变薄,从而使光电元件(39、40)变薄。能够检测第二面(44)上的入射可见辐射。

著录项

  • 公开/公告号FR2919387A1

    专利类型

  • 公开/公告日2009-01-30

    原文格式PDF

  • 申请/专利权人 COMMISSARIAT A LENERGIE ATOMIQUE;

    申请/专利号FR20070005478

  • 发明设计人 JEAN LOUIS OUVRIER BUFFET;

    申请日2007-07-26

  • 分类号G01J5/20;H01L27/14;

  • 国家 FR

  • 入库时间 2022-08-21 19:07:22

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