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BISPECTRAL DETECTION DEVICE AND BISPECTRAL DETECTOR COMPRISING SAID DEVICE

机译:双检测装置和包括所述装置的双检测器

摘要

The present invention relates to a bispectral detection device, particularly of an infrared radiation and a visible radiation, including a monolithic substrate; an array of bolometric micro-bridges sensitive to infrared radiation, the bolometric micro-bridges being suspended over a first face of the substrate by means of support and connection arms; and an array of photoelectric elements fowled in the substrate, and sensitive to visible radiation, the bolometric micro-bridges and the photoelectric elements being stacked. According to the invention, the substrate portion between the photoelectric element array and a second face of the substrate, opposite to the first face thereof, is thinned so that the photoelectric elements are capable of detecting a visible radiation incident on the second face.
机译:双光谱检测装置技术领域本发明涉及一种双光谱检测装置,特别是红外线和可见光的双光谱检测装置,其包括整体式基板。对红外辐射敏感的辐射热微桥阵列,辐射热微桥通过支撑和连接臂悬挂在衬底的第一面上。光电元件阵列聚集在基板中,并且对可见辐射敏感,辐射热微桥和光电元件被堆叠。根据本发明,使光电元件阵列与基板的与第一面相对的第二面之间的基板部分变薄,使得光电元件能够检测入射在第二面上的可见辐射。

著录项

  • 公开/公告号US2010065744A1

    专利类型

  • 公开/公告日2010-03-18

    原文格式PDF

  • 申请/专利权人 JEAN-LOUIS OUVRIER-BUFFET;

    申请/专利号US20090622521

  • 发明设计人 JEAN-LOUIS OUVRIER-BUFFET;

    申请日2009-11-20

  • 分类号G01J5/08;G01J5/00;

  • 国家 US

  • 入库时间 2022-08-21 18:55:22

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