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BISPECTRAL DETECTION DEVICE AND BISPECTRAL DETECTOR INCLUDING SUCH DEVICE
BISPECTRAL DETECTION DEVICE AND BISPECTRAL DETECTOR INCLUDING SUCH DEVICE
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机译:双检测装置和包括该装置的双检测器
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摘要
The invention relates to a bispectral detection device (20 ; 80), in particular for infrared radiation and visible radiation, that comprises: a solid-state substrate (21); a matrix of bolometric microbridges (23, 24) sensitive to infrared radiation, the bolometric microbridges (23, 24) being suspended above a first face (45) of the substrate by bearing and connection arms (31, 32); and a matrix of photoelectric elements (39, 40) formed in the substrate (21) and sensitive to the visible radiation, the bolometric microbridges (23, 24) and the photoelectric elements (39, 40) being superimposed. According to the invention, the portion of the substrate (43) included between the photoelectric elements (39, 40) and a second face (44) of the substrate opposite the first face (45) thereof is made thinner so that the photoelectric elements (39, 40) are capable of detecting an incident of visible radiation on the second face (44).
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