PNEUMATIC TYPE ACTUATOR AND ASSEMBLING DEVICE EQUIPPED WITH THE PNEUMATIC TYPE ACTUATOR

摘要

PROBLEM TO BE SOLVED: To achieve an actuator which makes possible at low cost delicate position control equivalent to the manual operation performed by an operator by the sense of touch.;SOLUTION: A piston rod 20 of a cylinder 14 and a valve body 32 of an air servo valve 30 are connected integrally to form a movable table 26 on which a load acts. An operation rod 66 connected to a spool 44 is provided outside the valve body. By moving the spool, an operation air supplying/discharging passage of the air servo valve 30 is opened to move a piston 18, and the operation air supplying/discharging passage of the air servo valve 30 is closed to stop the piston 18 when the piston 18 moves by the same amount as the spool 44. Thereby, the position of the movable table 26 is structured to be movable according to a movement amount of the operation rod 66.;COPYRIGHT: (C)2011,JPO&INPIT